下面是我公司的拳頭產(chǎn)品，還有不常用的未列出，但都有銷售，歡迎您來電詢價！ 施耐德140系列、AS系列 Honeywell 620系列 AB RELIANCE ELECTRIC系列 AB 1746、1785、1756、1747、1784、2094、2098、1394C、1336F、1745等系列
我司經(jīng)營范圍：各品牌DCS、PLC備件、 工業(yè)機(jī)器人系統(tǒng)備件、伺服控制器模塊 主營業(yè)務(wù)： 1、分散式控制系統(tǒng)（DCS） 2、工業(yè)控制通訊轉(zhuǎn)換器140ERT85410.不買貴的.只選對的 如果對本公司產(chǎn)品感興趣的朋友，詳詢、您好： 潤星*供應(yīng)：**全新一手貨源！產(chǎn)品圖片信息僅供參考，詳情請！ 我們期待您的來電！現(xiàn)貨 TRICONEX 3511 Foxboro 控制處理器 CP40B 卡件 勁爆價現(xiàn)貨 小謝 DS1181-000253-1B PCB BOARD DS1181-000257-16 PCB,ASSY,MC-31043A DS1181-000257-18 MC-31043A HSDL IO MODULE DS1181-000318-11 PCB, MC-31036A, FUNCTION SW DS1181-000540-14 PCB ASSY, MDIF-01A-1 DS1185-004073-13 MANIFOLD DS1187-000869-13 CLAMP QUARTZ CTA DS1187-001384-1C EMPERATURE CONTROLLER M-120 DS1187-001397-13 CONTROLLER, HEC PYRO DS1187-003566-11 JIG CTL, TM-1200TEMP DS1187-018115-11 ASSEMBLY INJECTOR UNION FVH MAIU 1187-018115-11 CTA DS1187-019936-11 TUBE ASSY P6-345 CTA DS1187-030388-11 PIPING,WATER COLE,W4-225 DS1187-042869-14 BURN OUT HEATER DS1187-043355-12 TUBE ASSY, G4-270 DS1187-043738-12 TUBE ASSY DS1187-043739-12 TUBE ASSY DS1187-04642-12 CLAMP QUARTZ DS1187-046462-12 QUARTZ CLAMP 1187-046462-12 CTA DS1187-046462-12 QUARTZ CLAMP 1187-046462-12 CTA DS1187-060464-15 MANIFOLD DS1187-060466-11 MANIFOLD DS1187-061373-11 GAS LINE, VF BARATRON FLEX DS1187-061375-11 GAS LINE, VF CLF3/SIH4 FLEX DS1187-093837-11 PCB ASSY,CNN DS1187-105089-11 TUBE ASSEMBLY DS1187-105090-11 TUBE ASSEMBLY DS1187-105098-11 PIPING WATER COOLING DS1187-109706-11 TUBE ASSEMBLY 1/2 DS1187-144941-11 PIPING, 1/4" GAS FL DS1187-149702-13 HEATER, EXT TORCH UNIT DS1187-149792-12 EXT TORCH UNIT DS1187-170243-11 INJECTOR,BACK-FILL,NODE DS2102-320236-11 TIMINT BELT DS2105-220399-11 TRAP, QUARTZ DS2105-320496-11 TRAP,PILEX DS2110-222564-14 AIR DUCT （3） DS2110-223623-11 HEAT INSULATOR （RING） 2110-223623-11 CTA DS2110-223624-11 HEAT INSULATOR 4-PORT D15 2110-223624-11 CTA DS2110-224230-13 SPACER..SUS304 DS2110-226131-12 PANEL HEATER DS2110-226416-11 E2 HEATER JACKET （LH） DS2110-226605-11 E2 HEATER DS2110-226738-11 HEATER,PANEL （3811） DS2110-227400-11 BASE PLATE（B） DS2110-227586-13 PANEL HEATER DS2110-230038-12 LOCKING RING ONO DS2110-324788-11 FLEX TUBE （3/8）, BELLOWS DS2110-324793-12 FLEX TUBE（S1H2CL4） DS2110-325282-11 TUBE,FLEX BELLOWS DS2110-329842-11 LIP SEAL DS2110-330148-11 SPACER..TEFLON DS2110-331782-11 HEATER PANEL DS2110-333071-11 BLOCK...PTFE DS2110-336267-11 PIPE, ELBOW, MANIFOLD DS2110-336297-11 PIPING,80A SIN TEOS POLY DS2110-336298-11 PIPING,80A FOR SIN TEOS POL DS2110-336323-11 PIPING,80A FURN FOR SIN TEOS POLY DS2110-336326-11 PIPING, 80A L FURN FOR SIN TEOS POLY DS2110-336327-12 PIPING, 80A, SIN TOE PLOY DS2110-336329-11 PIPING,80A FOR SIN TEOS POLY DS2110-336403-11 PIPING,80A FOR SIN DS2110-337479-11 PIPING, 80A, SUS316 DS2110-337480-11 PIPING, 100A DS2110-337481-11 PIPING , 100A..SUS316 DS2110-338371-11 PIPING 80A （810-52103R） DS2110-338610-11 HEATER E3 DS2110-338611-11 HEATER E4 DS2110-339450-21 PIPING, 100A DS2110-339584-11 PIPING, 100A DS2110-342303-11 JACKETS,HEATER,NITRIDE NODE DS2110-344894-12 PANEL HEATER （B3: EXH. PIPE） DS2110-421831-14 LABYRINTH SEAL,INNER DS2110-425611-11 SIC RING DS2110-430692-11 LABYRINTH SEAL, INNER, SUS316 DS2180-020430-12 MC-31151P（TS-4000Z P）DS1181-000569-19 DS2180-020431-12 MC-31151M（TS-4000Z M）DS1181-000570-19 DS2180-020432-12 MC-31151T（TS-4000Z T BOARD） DS2180-020433-12 MC-31151S（TS-4000Z S）DS1181-000572-1A DS2181-020009-12 PCB ASSY STC-C STC953134 DS2181-020010-16 PCB,ASSY,STC-P DS2181-020011-15 PCB ASSY STC-I/O DS2181-020059-15 PCB, RATIO I/L DS2185-025477-11 CLAMP, QUARTZ WARE CONNECTION DS2185-033653-11 COLD TRAP INNER ASSG DS2186-025200-12 CABLE, FLAT, 36 PIN, CP1 DS2186-025201-12 CABLE, FLAT CP2N DS2187-073966-13 TUBE ASSY DS2187-090105-12 PIPING,ISOMETERIC,2 DS2187-090213-12 PIPING, ISOMETRIC DS2187-095921-13 ASSY TUBE DS2187-097139-13 TUBE ASSEMBLY DS2187-136953-11 CLAMP QUARTZ PHAI50 DS2193-824689-11 CABLE, WAFER COUNTER DS2193-824699-11 CABLE, WAFER COUNTER DS410-419280-4 CHUCK, QUARTZ DS410-419281-4 CHUCK, QUARTZ DSF-000002-6 STRAP, DIFF. SUPER RING （PQK-5） DSME2-091510-C QUARTZ TRAP ME2-091510-C CTA DSME3-134540-B FLANGE DSME4-060010-A NUT DSME4-075560-A BLIND PLUG,20 DIA DSME4-144160A SLEEVE DSMF-019400A NUT KNURLING DSMJ2-031740-A METAL RING DSMJ4-085240-C PULLEY DSMT3-025560-C BALL SCREW DSMX3-042110-A SPACER, TEFLON PTFE DSMX4-028620-A NUT, MAGNETIC FLUID SEAL KIT DSMX4-032670-C SCREW, MAGNETIC FLUID SEAL DSMX4-032680-D SCREW, VF MAGNETIC FLUID SEAL DSMX4-041250-B SPRING,ARM,BOAT ELEVATOR..SUS304-WPA DSTB-00000-4 PCB ASSY DSTB-00000-5 PCB ASSY, DIGITAL I/O DSTB-00000-6 PCB ASSY E32-T14L SENSOR FIBEROPTIC EC80-000026-12 BOARD KIT EE-SB5M PROXIMITY SENSOR PTM ES-1810-223063-11 HOLDER UPPER E （TYPE2） ES-1810-223289-13 SLIT EXT PLATE W1. 6P3.1 （GROUND） ES-1810-325569-13 WALL ALUMINIUM CHAMBER （UPPER） （GROUND） ES-1810-325570-13 WALLALUMINIUM CHAMBER （LOWER） （GROUND） ES-1810-325571-14 WALL - RIGHT ES-1810-325572-14 WALL - LEFT ES011-000817-1 BATTERY TURBO CONTROL ES012-000157-1 VALVE AIR OPERATED FPR-UDDF-71-6.3 ES012-004135-1 VACUUM, VALVE ES012-004207-1 VALVE VACUUM 151-0040K ES012-005146-1 VALVE AIR OPERATED FRP-81-9-52 ES012-006700-1 CONTROLLER,PRESSURE..649A-12T1 MKS CTL ES013-000063-1 CHILLER PART..CONTROLLER ES013-000168-1 HEATER ES013-000173-1 CHILLER PART EG32F/5-15MA CB ES013-000174-1 SOLENOID ES013-000231-1 CONTROLLER UNIT ES013-000232-1 INDICATOR CONTROLLER UNIT ES013-000281-1 PT SENSOR ES014-000058-1 TEMPERATURE CONTROLLER E53-Q OUTLET UNIT ES017-002454-1 BELLOWS, SS2080000, GAP DRIVE ES017-002527-1 BELLOWS ES017-003055-1 BELLOWS ST09800002 ES017-004628-1 CHILLER HOSE ES020-000005-1 SCREW CAP, M3*6 SUS3004 ES020-000007-1 SCREW CAP, M3X8 SUS304 ES020-000009-1 SCREW CAP M3X10 SUS304 ES020-000037-1 SCREW CAP M4X15 SUS304 ES020-000042-1 SCREW CAP M4X20 SUS304（WAS ES020-001814-1） ES020-000043-1 SCREW CAP M4X25 SUS304 ES020-000087-1 SCREW M6 X 18MM ES020-000090-1 SCREW CAP M6X20 SU304 ES020-001006-1 SCREW M3 X 18MM ES020-001010-1 WING BOLT..M5*35 SS304 1-TYPE （PACK OF 10） ES020-001089-1 SCREW CAP M3X14 SUS304 ES020-001116-1 SCREW CAP M5X8 SUS304 ES020-001155-1 SCREW CAP M5X30 SU304 ES020-001164-1 SCREW CAP M6X30 SUS304 ES020-002492-1 SCREW CAP M5X70 SUS304 ES020-002510-1 SCREW CAP M6X50 SUS304 ES020-002519-1 SCREW CAP M5X40 SUS304 ES020-002642-1 SCREW, CSK HD M2 X 8 ES020-003419-1 SCREW,CAP,BOLT,INSIDE VAC ES020-003421-1 PLUG,SCREW,CAP,BOLT,INSID ES020-003637-1 SCREW M16 X 80MM ES020-100801-1 SCREW CAP M3X5 SUS304 ES022-100725-1 BEARING F696ZZEA ES022-101244-1 BEARING 7001ADT ES022-101245-1 BEARING 51201 ES023-000032-1 TIMING BELT B100S3M 900G ES023-000515-1 CHAIN DID25-130 LINKAGE ES023-001489-1 TRANSFER SYS BR940127 PUSH PIN ES023-001490-1 PA PLATE ES023-001504-1 XFR SYS..BR9400441-7 WINDOW DIA35 GLASS ES023-001523-1 TRANSFER SYST. ES023-001540-1 XFR SYS BC9450082 ES023-001548-1 CASSETTE ELEVATOR MOTOR ES023-001549-1 MOTOR, TRNSFR, CASS. PIVOT ES023-001596-1 AMPLIFIER ES023-001755-1 SPACER=0.2MM ES023-001756-1 SPACER=0.3MM ES023-001759-1 PACER=0.6MM ES023-001760-1 SPACER=0.7MM ES023-001761-1 SPACER=0.8MM ES023-100924-1 TIMING BELT B60S3M 276U ES023-100926-1 TIMING BELT B60S3M 264U ES-1 TIMING BELT ES023-100930-1 TIMING BELT B60S3M 177U ES023-101114-1 TIMING BELT 140T-80-6.4 ES024-008917-1 GAS BOX He FILTER. . WGFG 32P R1（024-008 ES024-009795-1 FILTER WGMS 02P RU ES024-011063-1 IN-LINE GAS FILTER ES024-012727-1 VAC ION GUAGE ES024-013929-1 AIR CYLINDER CJ2L10-75-XB9 ES024-015091-1 REGULATOR, SQMICR0302PFSMM ES024-015345-1 FILTERE BFA-02-100-ST ES024-016619-1 FILTER ES024-017816-1 #CLAMP..800-C00-000 ES025-000502-1 GAS SPRING（DAMPER） ES027-000025-1 O-RING VITON AS568-236 ES027-000132-1 O-RING FLUOROSILICON 1255-70 ES027-000199-1 O-RING VITON P12.5 ES027-000210-1 O-RING P25 BLK （P/C BOT） ES027-000768-1 O-RING VITON D0270 P-8 BLACK ES027-000771-1 O-RING ES027-000773-1 O-RING VITON D0270 AS568-241 BLACK ES027-000779-1 O-RING VITON D0270 AS568-242 BLACK ES027-000782-1 O-RING VITON D0270 AS568-223 BLACK ES027-000787-1 O-RING VITON D0270 AS568-226 BLACK ES027-000823-1 O RING VITON D0270 AS568-261 ES027-000826-1 O-RING VITON D0270 AS568-224 BLACK ES027-000828-1 O-RING VITON D0270 AS568-270 BLACK ES027-000830-1 O RING VITON D0270 AS568-281 ES027-000834-1 O-RING ES027-000845-1 O-RING VITON D0270 AS568-256 BLACK ES027-000850-1 O-RING VITON D0270 AS568-233 BLACK ES027-000851-1 O-RING VITON D0270 AS568-381 BLACK ES027-000870-1 O-RING VITON D0270 AS568-214 BLACK ES027-000881-1 O-RING VITON D0270 AS568-384 BLACK ES027-000917-1 O-RING FLUROSILICON 1255-70 AS568-123 BLACK ES027-001258-1 O-RING,FLOROSLICN,1255-70 P-21 BLU ES027-001529-1 O-RING ES027-001571-1 O-RING VITON DO270 （PACK OF 10） ES027-001605-1 O-RING ES027-001624-1 O-RING FLUOROSILICON 1255-70 ES027-001626-1 O-RING ES027-001629-1 ORING ES027-001662-1 O-RING ES027-001710-1 TRANSFER CHAMBER LID O-RING ES027-001760-1 O-RING ES027-001762-1 O-RING ES027-001794-1 O-RING ES027-002529-1 O-RING..CHEMRAZ AS568A-232 ES027-002539-1 O-RING..CHEMRAZ AS568A-229 ES027-002743-1 O-RING, VTNAS568-393, BLK ES027-002841-1 O-RING..FS, 1255-70, AS568-280, BLU ES027-002988-1 O-RING, CHEMRAZ59, AS568A-394, WH ES027-003178-1 ORING 2-272 ARMOR CRYSTAL A60 ES027-003420-1 ORING,VITON AS568-473BLK ES027-003538-1 ORING ARMOR 2-252 ES027-003541-1 O-RING ES027-003570-1 O-RING ES027-003819-1 O-RING （AS-568A-393） ES027-100162-1 O-RING VITON P-12 BLACK ES027-100167-1 O-RING VITON P-8 BLACK ES027-100216-1 O-RING VITON P-16 BLACK ES027-100269-1 O-RING NBR IA P-3 BLACK ES027-100456-1 O-RING ES027-100853-1 O-RING VITON V-175 BLACK ES027-100947-1 O-RING UPPER BELLOWS AS568-265 BLK ATL ES027-101004-1 O-RING ES027-101005-1 O-RING ES027-101034-1 O-RING ES027-101039-1 O-RING ES027-101123-1 O-RING ES027-101147-1 TIMING BELT ES027-101301-1 O-RING VITON AS568A-220 BLK （P/C BOT.） ES027-101363-1 ES027-101363-1 X-RING VITON R-45 BLACK ES027-102114-1 O-RING FLUOROSILICAN 1255-70 ES027-102178-1 O-RING FROLO SILICON E0470 AS568-220 BLUE ES027-102247-1 O-RING VITON AS568-388 ES028-001986-1 FITTING TUBE PL4-01M ES028-002147-1 FITTING TUBE F900-F-12.7 ES028-002228-1 FITTING TUBE F900-HP-12.7D ES028-002242-1 FITTING, TUBE, F900-JP-19.05 ES028-002246-1 FITTING TUBE F900-L-12.7 ES028-002414-1 FITTING PART UJR-6.35G-NI GAS ES028-002415-1 FITTING PART UJR-6.35G-NI-O GAS ES028-002495-1 FITTING FLANGE 170-316 NW10/16 ES028-002542-1 FITTING VACUUM NI-8-VCR-2 ES028-006925-1 FLANGE ES028-008737-1 ASSY SEAL NW160 ES028-009116-1 FITTING FLANGED 100760520 NW25 ES028-010050-1 GASKET （SS-12-VCR-2） （PACK OF 10） ES028-010314-1 FITTING PART UJR-9.52RE-RG-O GASKET ES030-022073-1 CONNECTOR COAX BNC-BA-JJ-HV ES030-999083-1 CONNECTOR COAX BNC-P-HV ES031-002469-1 SWITCH MAGNETIC, BMKT107102 ES036-002147-1 SENSOR,PRESS,CE10-SO2-VCR ES036-003298-1 SENSOR PRESSURE CMLH-11-100SO ES036-003364-1 SENSOR, PRESSURE, 627A-13615 （BARATRON） ES036-003516-1 PRESSURE SENSOR PT PSB 10-1-4M CABLE ES036-003570-1 FLOW SWITCH ES036-100476-1 WATER LEAK DETECTOR S-1F （1M） ES039-000018-1 PCB DC: RAX12-8RS （ATM PS BOX） ES039-126638-1 PCB DC:RM12-6R3GB（ATM PS BOX） ES042-000229-1 LENS, EPD ES043-000721 HEATER ES043-000723-1 HEATER JACKET SILICON RBR 20 * 670/580HM ES043-000724-1 HEATER JACKET SILICIN RBR 20 * 900/60.1 OHM ES043-000726-1 HEATER JACKET SILICON RBR ES043-000727-1 HEATER SILICONE RUBBER ES043-000728-1 BELLOWS HEATER ES043-000730-1 HEATER JACKET SILICON RBR ES043-000731-1 HEATER JACKET SILICON RBR ES046-000226-1 LAMP SLP129 E12 ES046-000316-1 LAMP LMH-7FJ AC220V WHITE ES046-162396-1 LAMP LMH-162K W AC220V ES046-700394-1 LAMP LMH-7FJ AC110V GREEN ES046-700395-1 ALMP LMH-7FJ AC220V GREEN ES047-001162-1 TUBE SPIRAL NI-06 SHIELD ES050-001798-1 HARD DISK DRIVE ES070-000047-1 TOOL 6LTDK SCREW DRIVER TORQUE ES071-000319-1 SILICON HEATER JACKET GLUE （8401 PUMP STACKS） ES071-001250-1 SHEET,CONDUCTIVE..10-04-17 1500MM ES1805-220098-11 SHIELD RING, POLISHED. T7L5 ES1805-320125-21 COVER RING INNER ES1805-320126-21 COVER RING OUTER ES1805-320127-21 BASE RING INTEGRATED（SCCM-OX） ES1805-420055-11 PLATE WINDOW EPD（LLD-SE） ES1810-120660-13 UEL BODY （UNITY85PE） ES1810-121002-15 SPACER CERAMIC ES1810-121085-17 DEPO SHIELD ES1810-121190-12 ESC LOWER ELECTRODE 8N （PB-UP） ES1810-121898-13 SHIELD DEPO LOWER-Y ES1810-121899-12 PLATE EXHAUST T6 EXH-Y ES1810-220986-14 INSULATING PIPE （8K-ESC） ES1810-221024-14 UPPER COOLING PLATE ES1810-221063-14 EXHAUST RING B（8K-ESC） ES1810-221470-24 UPPER ELECTRODE （8K-180） ES1810-222811-11 INSULATOR UPPER ES1810-223289-13 SLIT EXT PLATE W1. 6P3.1 （GROUND） ES1810-223352-11 COVER WALL CHAMBER BOTTOM （GND） ES1810-223352-11 COVER WALL CHAMBER BOTTOM （GND） ES1810-224511C11 FOCUS RING 8-NW-2（8K-ESC） ES1810-225123-11 FOCUS RING ES1810-322044-11 CENTERING W/MESH （4"） ES1810-322129-12 EXN RING A （8K-ESC） ES1810-323416-11 RING LABYRINTH（IPB） ES1810-323442-11 O-RING SHIELD A （IPB）（P/CGAP） ES1810-323444-11 O-RING SHIELD B （IPB） （P/C GAP） ES1810-323445-11 O-RING SHIELD B （IPB） （P/C GAP） ES1810-323465-11 HOLDER CERAMIC IEM B ES1810-323466 -11 HOLDER CERAMIC IEM C ES1810-323467-13 RF ROD（IPB） ES1810-323759-13 LIFTER X （8KI-ESC） ES1810-323760-12 LIFTER GUIDE （8KI-ESC） ES1810-323783-11 RF CONNECTOR A2 （IPB） ES1810-323897-11 RING PROTECT ES1810-324233-12 HOLDER ISOLATION GND ROD ES1810-324276-12 PIN LIFTER ES1810-324964-1 BELLOWS COVER ES1810-325059-11 PIN LIFTER ALUMINIUM ES1810-326611-11 WINDOW PLATE ES1810-327364-11 PTFE HOLDER ES1810-328005-11 COVER,PROTECT,ESC ES1810-328123-11 BELLOWS LIFTER ES1810-329064-12 WINDOW, AL-3-Y - ES1810-329078-11 COVER, SCREW A-AL-Y ES1810-329079-11 COVER, SCREW B - AL ES1810-424823-12 FEED TERMINAL ES1810-424835-12 SPRING B（ESC-3） ES1810-424945-16 SUPPORT GUIDE （8K-ESC） ES1810-424947-12 LIFTER SUPPORT （8K-ESC） ES1810-424955-11 RF ROD ES1810-425089-11 LIFTER STOPPER A （8K-ESC） ES1810-426215-11 TEFLON CAP B ES1810-426886-11 SCREW LIFTER （8KI-ESC） ES1810-426982-12 TEFLON RING ES1810-427260-11 CAP ES1810-427469-11 SCREW BLANK ES1810-427566-12 RF CONNECTOR B2 （IPB） ES1810-427841-12 LEVER ES1810-427842-12 STOPPER ES1810-427859-12 RF BLOCK TYPE B ES1810-427905-11 BLIND RF BLOCK（INSULATOR） ES1810-428050-11 FITTING INLET GAS B ES1810-428121-11 CREW BLANK ES1810-428129-11 SHIELD WINDOW ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50 ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50 ES1810-428336-11 TERMINAL, HIGH VOLTAGE ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL （0.5DIA） ES1810-428715-12 CAP ALUMINIUM 2 ES1810-428806-11 UV CUT FILM （VIEW PORT） ES1810-428943-11 SUPPORT LIFTER 4 （IPB） ES1810-429126-11 GAS LINE P/C-2-UP （IPU） ES1810-429138-11 H CONNECTION TUNE （UP）（IPB） ES1810-429291-11 PIPE GAS HE ES1810-429649-11 PUSHER LIFTER （PTFE） 3 ES1810-429707-12 UPPER ARM WIRE 180316 NYLON ES1810-429708-11 WIRE FOR ROBOT ARM ES1810-429709-11 WIRE FOR ROBOT ARM ES1810-430038-11 PLATE HOT BUSSBAR（RF） ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY ES1810-431227-11 CAP C/P（MNT） For 85 SCCM UEL. ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI. ES1880-020093-16 POWER SPLITTER ES1880-020094-15 MATCHER, MFM-20SA2 ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166 ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116 ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161 ES1880-027247-12 BALL SCREW W1502-215X-C5T6 ES1880-027248-12 BALL SCREW W1502-216X-C5T6 ES1880-027504-11 AIR CLYINDER UC2-40-40-B2 ES1881-022002-19 PCB SYSTEM I/O 2 （ATM/MAIN SUB 06&07） ES1881-022004-1C PCB EPD MONITOR BOARD （MAINTE CTLER） ES1881-022005-52 PCB EXT UNIT INTCON BOARD （DTM） ES1881-022006-13 PCB VAC INTCON BOARD ES1881-022018-17 PCB U/C IF BOARD（MAINTE CTLER） ES1881-022019-14 PCB REPEATER BOARD ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L （L/L1） ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L （L/L1） ES1881-022047-72 PCB VACUUM CONTROL BOARD 2 ES1881-022048-11 PCB CHAM INTCON BOARD 2 （E/S） ES1881-022060-26 PCB EPD MONITOR BOARD 2（ESC） ES1881-022071-21 PCB AC DIST BOARD （HAS） ES1881-022075-11 PCB AGV MODE SW INTCON BOARD（ATM） ES1881-022118-28 PCB TSBC-V30B（SUB1）K8 （ATM/MAIN SUB 01） ES1881-022126-12 PCB CHAM INTCON BOARD 3 （P/C） ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN（TMP） ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM （ATM/OPER IF） ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3（MAINTE CTLER） ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3（I/L） ES1881-022141-12 PCB RF CONTROL BOARD 4 （RF RACK） ES1881-022142-11 PCB GAS IF BOARD（HE2） ES1885-021882-12 P/C SHIELD RING ES1886-455163-13 INDEXER ENCODER ES1886-455164-12 INDEXER WATER SENSOR（LASER） ES1886-455164-13 INDEXER WATER SENSOR （LASER） ES1886-455165-12 INDEXER WATER SENSOR（PHOTO DIODE） ES1886-455165-13 INDEXER WATER SENSOR （PHOTO DIODE） ES1886-455221-12 P/C WALL PT SENSOR ES1886-455291-11 CHUCK MOTOR ASSEMBLY ES1886-455292-11 MOTER （P/A TWEEZERS） ES1886-455294-1 MOTOR （P/A） ES1886-455441-11 RF CABLE ES1886-456363-12 ROTARY MOTOR AND ENCODER ES1886-456364-12 EXTENDER MOTOR AND ENCODER ES1886-457617-17 RF CABLE 10M （ES1D86-008352-12） ES1886-458247-11 HAM LIFTER CYLINDER （ESC） ASSY ES1886-461134-13 RF GENERATOR-MFG-20A1 ES1887-421988-11 GATE VALVE ASSEMBLY （IEM POLY） ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN ES1D0-311007-12 TENSIONER GAP A1 ES1D02-400026-11 SPROCKET DRIVE ES1D02-400026-11 SPROCKET DRIVE ES1D02-400215-11 SHIELD SPIRAL U-CHAM （S-DT） ES1D02-400262-11 SCREW BEARING ES1D05-200020-11 SHIELD DEPO ES1D05-200020C11 SHIELD, DEPO QU-A-3 （DRM2） ES1D05-200031-11 COVER..BAFFLE Q-L3（DRM2） ES1D05-300038-14 SHIELD DEPO DRM2 ES1D05-300053-14 RING INSULATER B2 （DRM2） ES1D05-300083C13 PLATE UPPER QB FLAT ES1D05-300152-11 COVER..BAFFLE,Q-L,（DRM2） ES1D05-300152C11 COVER,BAFFLE,CESC ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1 ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC ES1D05-300162C11 RING, FOCUS ES1D05-400022-14 WINDOW SHIELD DEPO DRM2 ES1D05-400022C14 WINDOW SHIELD DEPO（DRM2） ES1D05-400028-11 WINDOW, UP A-2 （DRM） ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC ES1D10-100386-11 INSULATOR, BOTTOM P ES1D10-100670-13 ELECTRODE UPPER QB FLAT ES1D10-100907-12 BAFFLE PLATE ES1D10-100915-11 ELECTRODE UPPER QB. FLAT ES1D10-100938-12 RF PLATE,PC1 （DRM2） ES1D10-101111-11 RF PLATE,PC2 （DRM2） ES1D10-101446-22 PLATE,BAFFLE 0-12（DRM2） ES1D10-1014746-22 PLATE BAFFLE 0-12 （D RM2 ） ES1D10-190272-TM COOLANT PIPE ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E ES1D10-200705-14 UPPER, ELECTRODE, 1, （DRM2） ES1D10-200733-11 RING, SHIELD （DRM2） ES1D10-200921-12 DEPO SHIELD ES1D10-201429-15 UPPER,ELECTRODE R-1 ES1D10-201588-12 UPPER ELECTRODE P （DRM2） ES1D10-201595-15 SHIELD, DEPOT 85L DRM2 ES1D10-202177-12 UPPER ELECTRODE ES1D10-203753-12 RING, CENTERING-Y ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED ES1D10-301452-12 HOLDER,BEARING,（DRM2） ES1D10-302057-11 JIG, GAP （DRM2） ES1D10-302569-13 BRACKET..SLIDE,R,（DRM2） ES1D10-302586-12 COVER BELLOWS B ES1D10-302600-11 SUPPORT S-PIPE ES1D10-302869-11 PUSHER PIN ES1D10-302936-11 SHAFT RF INLET ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2 ES1D10-303124-16 DEPO SHIELD ES1D10-303124-M1 SHIELD, DEP ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE ES1D10-303367-14 PIPE, TEE ES1D10-304039-11 FLEXLINE, HE/VAC ES1D10-305152-11 COVER , SCREW TEFLON ES1D10-305523-12 PIPE HE-IEM-UP ES1D10-305996-11 IPE..HE1-8 ES1D10-306221-13 JIG RING, 2 （DRM2） ES1D10-306628-11 WINDOW DEPO DRM2 ES1D10-308722-11 RING, FOCUS, SEASONED ES1D10-311007-12 TENSIONER GAP A1 ES1D10-311008-11 TENSIONER GAP B1 ES1D10-311117-12 PIPE PN2-CC-3 ES1D10-311258-11 COVER,BEL-L（C-ESC） ES1D10-311259-11 COVER,BEL-S,（C-ESC） ES1D10-311259-11 COVER,BEL-S,（C-ESC） ES1D10-311745-13 RING, BELLOWS UPPER ES1D10-311758-11 RING, BELLOWS LOWER ES1D10-312197 RING, FOCUS, （C-ESC 4.0MM SIC） ES1D10-312197-11 RING, FOCUS, （C-ESC 4.0MM SIC） ES1D10-312204-11 RING, FOCUS, （C-ESC 3.4MM SIC） ES1D10-313045-11 RING..F-8S-GC-260-3.2 ES1D10-314780-12 RING BELLOW ME CHAMBER ES1D10-390020-TM GASKET ES1D10-390510-TM WINDOW,UPPER WALL EPD ES1D10-390540-TM PLUG DEPO SHIELD FOR CERAM IC ES1D10-390908-TM LIFTER T-HANDLE ES1D10-401239-11 SHAFT DRIV FOR CHAIN ES1D10-401722-11 COVER,ESC ES1D10-402032-11 BUSH P-PIN ES1D10-402033-11 SUPPORT BUSH ES1D10-402043-11 SUPPORT S-PIPE ES1D10-402047-11 BUSH..PIPE,COOLING,（DRM2） ES1D10-404150-11 SLEEVE, A DRM2 E ES1D10-404281-12 PIPE UEL A （DRM2） ES1D10-404854-11 GUIDE, CE-ESC, DRM2C （PACK OF 10） ES1D10-405369-11 BASE IDLE A ES1D10-405373-12 COLLAR C-1（DRM2） ES1D10-406875-11 PIN SUPPORT Q-S1（DRM2） ES1D10-406876-11 PIN SUPPORT Q-S2（DRM2） ES1D10-407211-11 SHEET SUPPORT-125（DRM2） ES1D10-407410-11 COLLAR D-2 ES1D1805-320140-11 COVER, RING INNER SCCM - ES1D80-000626-1X APC BOARD ES1D80-000700-11 EPD,FIBER ES1D80-000999-11 PUSH MOTOR DRIVER ES1D80-001025-11 NESLAB COOLING TYPE CHILLER ES1D80-001878-12 LEN EPD TYPE2 ES1D80-002077-12 XFR SYS..BC930197 SRC2/014 ES1D80-002201-12 XFR SYS RELAY BOX ES1D80-002331-12 GATE VALVE ES1D80-002332-12 VALVE GATE ES1D80-002336-12 VALVE GATE ES1D80-002751-11 ANGLE VALVE, XLA-40-X519 ES1D80-002787-12 BA GAUGE LEYBOLD ITR100-T ES1D80-002858-11 ENDPOINT CABLE ES1D80-002917-11 BREAK FILTER ES1D80-003560-11 REGULATOR ES1D80-004121-25 MATCHER,,AMN-30C11 ES1D81-000049-13 PCB PRESSURE SWITCH I/F BOARD ES1D81-000065-27 PCB AC POW FAIL DET BOARD B ES1D81-000088-11 PCB ASSEMBLY TV B0008-1/VMIF ES1D81-000092-16 PCB ASSEMBLY TYB121-1/COM ES1D81-000097-A5 PCB ASSEMBLY TYB212-A/FR ES1D81-000098-B2 PCB ASSEMBLY TYB 112-BDIO ES1D81-000098-B4 BRD, ASSY, TYB112-B/DIO ES1D81-000098-B8 PCB, TYB-111B/DIO ES1D81-000099-A5 PCB ASSEMBLY TYB111-A/MAIO ES1D81-000104-14 PCB TYB411-1/TC ES1D81-000113-17 PCB ASSEMBLY TYB221-1/PUMP ES1D81-000118-15 PCB TYB417-1/OPE ES1D81-000130-19 PCB, TYB416-1/PUMP ES1D81-000136-22 PCB TYB223-2/SW ES1D81-000137-12 EXTENER CARD ES1D81-000142-17 TYB41F-1 P/C ES1D81-000292-14 PCB TYB412-1/CC ES1D81-000293-11 PCB TYB31D-1/TC ES1D81-000302-11 I/FBOARD ES1D85-009005-13 88DRM GROOVE ESC ES1D86-003374-15 CABLE TC , CONV （T/C） ES1D86-003597-12 HEATER,ASSY ES1D86-003599-12 HEAT WALL RELAY CABLE ES1D86-003676-12 PC 1 SENSOR CABLE ES1D86-003775-14 ESC HIGH VOLTAGE CABLE ES1D86-003812-13 SENSOR, PC, PC2 WALL PT ES1D86-003814-12 SENSOR ASSY PC/PC2 ES1D86-003950-12 CABLE,GHOST COMMUNICATION ES1D86-004358-12 T/C ES1D86-006761-21 RF CABLE ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN ES1D86-006889-11 SENSOR, PC, PC2 COVER OPEN ES1D86-009061-13 TC/SENSOR PC 1 BOTTOM ES1D86-009062-13 T/C SENSOR ES1D86-017747-11 SENSOR, PRESSURE, 622A01TDE ES1D86-050199-11 CABLE ASSY..HDD BASE（SIG） ES1D86-092740-TM CA:31D/CN14 TO417/CN2 ES1D87-000832-12 MONOCHRO UNIT, EPD BOX ES1N10-402337-11 PIN POSITIONING ES1N80-000067-13 RF GENERATOR, OEM-10B-8 ES203-001757-1 SPACER=0.4MM ES3D10-302567-12 EXTRACTOR FOCUS RING ES802-420023-1 CONNECTOR ADD WORK ES810-220644-1 GATE ES810-220689-1 BAFFLE B （8K） ES810-220690-2 BAFFLE C （8K） ES810-321363-1 WIRE ASSEMBLY ES810-420062-1 SUPPORT, SHAFT, CLAMP ES810-420072-1 LANTERN RING （6 DIA） ES810-420170-1 COLLAR （12-6.2） ES810-420197-2 RING BACKUP GATE ES810-420212-1 LANTERN RING ES810-420595-1 RF CONNECTOR ES810-420901-1 SCREW BRACKET ES810-420924-1 SHIELD BUSHING ES810-420950-1 LIMIT FLAG ES810-420951-1 CONNECT BLOCK ES810-422081-1 BACK UP RING ES810-423392-2 SCREW ES810-423457-2 SPROCKET 5KB ES810-423575-2 BAFFLE SCREW （L=12） ES810-423576-2 BAFFLE SCREW （L=5） ES810-423904-2 GAS INLET ES810-424023-1 LINKAGE DRP ES810-424095-1 GAP MOUNT..MOTOR,（5KB）# ES810-424122-1 HOLD PIN ES810-424133-2 WINDOW（2） ES880-020077-1 DIFFERENTIAL PRESSURE SWITCH ES880-020115-3 EJECTOR ZX1052-J26LZ-EC-X116 ES880-020116-2 VV5J3-D32P1-04-C4-X68 ES880-020125-6 CYLINDER C-2-FA-60-R3 ES880-020334-1 GALDEN LINE TV CHAMBER ES881-521480-7 PCB TSBC-COMIF-B（ATM/MAIN 01 SUB 08） ES881-521490-7 PCB TSBC-V30SLV SUB 3（ATM/MAIN 04） ES881-521491-1 PCB TSBC-V30SLV SUB 2（ATM/MAIN 03） ES881-620571-3 PCB EDGE DETECTOR BOARD （ATM） ES881-620641-2 PCB EPD BOARD （KTN） ES881-620890-2 PCB H/A ROT/EXT INTCON BOARD （ATM） ES881-621144-2 PCB AC POW FAIL DET BOARD 2 （CONT） ES881-621472-1 PCB SLAVE IF（STD）WITH REG.（ATM） ES881-621473-4 PCB SLAVE IF（STD）NO REG. （ATM/OPER IF） ES881-621500-2 PCB SBX-S104（ATM/MAIN 07） ES881-621601-2 PCB CHILLER IF BOARD （I/L） ESD1D81-000130-18 PCB TYB 416-1/PUMP ESM10-100639-1 UPPER ELECTRODE C,COOLING F10-75815-15 CRYO MAIN VALVE F370-1586-03 KEYBOARD F689ZZ FLANGED ROLLER BEARING F697ZZ BEARING F900-F-6-35 CONNECTOR （GAS TUBE） F900-H-9.52C 9.52 FITTING TUBE F900-H-9.52C F95-44620 FLOWMETER F95-46090 FLOWMETER FC-*-TUR FLOWMETER & FLOWSWITCH EXT BUR FC-*-TUR FLOWMETER & FLOWSWITCH EXT BUR FC-SE-01 FLOW CHECKER FE52-3TPS 030130 HOT-GP-230--1 FPR-6.35 GT HEAD FU081061 PAD SILICONE, TRANSPORTER PAN GF99-41088 FLOWMETER GFG01KP3 WAFERGARD GASLINE 1/8"FILTER GP-1SRY-S CONTROLLER, PIRANI GUAGE H1-X 706-0001 82334.5 CW MOTOR CHOP ASSEMBLY H7881-AA POWER SUPPLY FOR DECSERVER700 HPS-102 PIPING HPS-102 PIPING HPS-109 PIPING P-D-POLY HPS-111 PIPING HPS-113 PIPING HSR15CA-230LM LINEAR GUIDE FOR ROBOT HZCAA1025AC001 PROFILER PAPER LP'S ICC-G-MB-250L ION EXCHANGER FOR DI WATER ID80-002748-11 VALVE, VAC, V376 IFR048205 INITIAL STATION SENSOR 302-077.005- IM15-ZQ STAGE ZQ IV10-361807-13 FARADAY, PIN INSULATOR IVBH25CA-NWKL-29-SC VALVE, MAIN HEATER K1010 CHUCK MOTOR CABLE KITZEA200-UTE PURGE VALVE OUT KR1075 RBLD KIT, TREBOR 75 SURG KTI-221018-14 RING, SHIELD T5 P/C L25-YA54 CABLE, T.C. L420449 BEARING L456105-05 O-RING P8FPM（S5000） L456759 S500 SAMPLE ROD O-RING ,L456759. LF-1260ZZ BEARING LH00808-CPU BOARD, CIRCUIT LMH7FJW LAMP LMK25 LINEAR BUSH LMK25M LINEAR BRUSH LMK25MAUU SLIDE BUSH LPV1-25-AK-CNVS VALVE FOR ON BOARD CRYO 8F M-121CTL FURNACE TEMP CONTROLLER M02-400071-1 WAFER ROTARY GEAR A M02-400072-2 WAFER ROTARY GEAR （B） M02-400128-1 CENTER RING MESH #8 50 M054000031 SPRING M0840-39950-SS520 O-RING CHAMBER LID M10-100029-6 6" LOWER ELECTRODE M10-10030-6 UNDER ELECTRODE M10-200037-2 CHAMBER BOTTOM SPACER
